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Facilities
Characterization Equipment
Processing Equipment
Mask Aligner
Plasma Etcher
Spin-Coater
4-Target Sputter
Mini Sputter (Au, C)
DI Water Generator
Ni Sputter
Vacuum Oven
UV Laser (355 nm)
3D Printer
Homogenizer
Glove Box
Box Furnace
Probe Station
Semiconductor Parameter Analyzer
(Keithley-4200)
Optical Microscope
Workstation
Scanning Electron Microscope (SEM)
Laser Scanning System
Sourcemeter
(Keithley-2450)
Function Generator
(Keysight-33210A)
Digital Multimeter
(Keithley-DMM7510)
Electrometer
(Keithley-6514)
Digital Oscilloscope
(Teledyne-T3DSO1204))
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